๋ณธ๋ฌธ ๋ฐ”๋กœ๊ฐ€๊ธฐ

Micro loading effect

 (1)
[Etch ๊ณต์ • ์‹ฌํ™” 1] Etch ๊ณต์ •์˜ ์ •์˜์™€ ์šฉ์–ด Etch ๊ณต์ •์˜ ์ •์˜์™€ ์šฉ์–ด 1. ์‹๊ฐ ๊ณต์ •์˜ ์ •์˜ ๊ฐ๊ด‘๋ง‰ ํ˜„์ƒ ๊ณต์ •์ด ๋๋‚œ ํ›„ ๊ฐ๊ด‘๋ง‰ ๋ฐ‘์— ๊ธธ๋Ÿฌ์ง„ ์‚ฐํ™”๋ง‰ ํ˜น์€ ๋ฐ•๋ง‰๋“ค์„ ๊ณต์ • ๋ชฉ์ ์— ๋”ฐ๋ผ ๋ถ€๋ถ„์ /์ „์ฒด์ ์œผ๋กœ ์ œ๊ฑฐํ•˜๋Š” ๊ธฐ์ˆ  - ๋ชฉ์  : ๋…ธ๊ด‘ ๊ณต์ •์— ์˜ํ•ด ๊ฐ๊ด‘์ œ์— ํŒจํ„ด์ด ํ˜•์„ฑ๋œ ๋‹ค์Œ, ๊ฐ๊ด‘์ œ์˜ ํŒจํ„ด์„ ์‹ค์ œ ๋ฐ•๋ง‰์— ์˜ฎ๊ธฐ๋Š” ๊ณผ์ • - ๋ฐ˜๋„์ฒด ์†Œ์ž ์ œ์ž‘์—์„œ์˜ ๋ถˆํ•„์š”ํ•œ ๋ถ€๋ถ„์„ ์ œ๊ฑฐํ•˜๋Š” ๊ณต์ • · ๋ฐ˜๋„์ฒด ๊ณต์ •์—์„œ ์ง‘์ ๋„๋ฅผ ๊ฒฐ์ •ํ•˜๋Š” ๊ฒƒ · ์„ ํƒ์  ์‹๊ฐ๊ณผ ๋น„์„ ํƒ์  ์‹๊ฐ 2. ์‹๊ฐ ๊ด€๋ จ ์šฉ์–ด 1) Etch Bias(Skew) = Wb(Photo Dimension=ADI CD) - Wa(Etch Dimension=ACI CD) - Reticle CD - ADI CD : After Development Inspection - ACI CD : After Cleaning Inspe..

ํ‹ฐ์Šคํ† ๋ฆฌํˆด๋ฐ”